晶圆制造自动化物料运输系统调度(英文版)(精)

1 Semiconductor wafer fabrication system 1.1 Semiconductor Manufacturing Industry 1.1.1 Development and Current Status of the Semiconductor Manufacturing Industry 1.1.2 Future ChaUen.es in the Semiconductor Manufacturing Industry 1.2 Processing of Semiconductor Chips 1.2.1 Wafer Preparation 1.2.2 Wafer Fabrication 1.2 ,3 Wafer Sort 1.2.4 Chip Packaging 1.2.5 Chip Final Measurement 1.3 Constitution of the Semiconductor Wafer Fabrication System 1.3.1 Wafer Processing System 1.3.2 Material Handling System 1.4 Production Scheduling in the Semiconductor Wafer Fabrication System References 2 Automated material handling systems in SWFSs 2.1 Development of Material Handling Systems in SWFSs 2.1.1 Semi-automated Material Handling Systems 2.1.2 Automated Material Handling Systems 2.1.3 Intelligent Material Handling Systems 2.2 Components of the Automated Material Handling System 2.2.1 Carriers 2.2.2 Transport System 2.2.3 Storage System 2.2.4 Tracking System 2.2.5 Control System 2.3 Layout of the Automated Material Handling System 2.3.1 Single-spine Configuration 2.3.2 Double-spine Configuration 2.3.3 Integrated Configuration 2.3.4 Perimeter Configuration 2.3.5 Mixed Configuration 2.4 Features of the Automated Material Handling System References 3 Modeling methods of automated material handling systems in SWFSs 3.1 Modeling Methods Based on the Network Flow 3.1.1 Basic Theory of the Network Flow Model 3.1.2 Network Flow Modeling Process for AMHSs 3.2 Modeling Methods Based on the Queuing Theory 3.2.1 Basic Theory of the Queuing Theory Model 3.2.2 Queuing Theory Modeling Process for AMHSs 3.3 Modeling Methods Based on Mathematical Programming 3.3.1 The Mathematical Programming Model 3.3.2 Mathematical Programming Modeling Process for AMHSs 3.4 Modeling Methods Based on the Markov Model 3.4.1 Basic Theory of the Markov Model 3.4.2 Markov Modeling Process for AMHSs 3.5 Modeling Methods Based on Simulation 3.5.1 Basic Theory of the Simulation Model 3.5.2 Simulation Modeling Process for AMHSs 3.6 Modeling Methods Based on the Petri Net 3.6.1 Basic Theory of the Petri Net Model 3.6.2 Petri Net Modeling Process for AMHSs 3.7 Conclusion References 4 Analysis of automated material handling systems in SWFSs 4.1 Running Process Description 4.2 Methods for Analyzing Running Characteristics 4.3 Modified Markov Chain Model 4.3.1 Notation and System Assumption 4.3.2 MMCM's State Definition 4.3.3 Modeling Process of the MMCM 4.3.4 Model Validation 4.4 Analysis of AMHS Based on the MMCM 4.4.1 The Overall Utilization Ratio and the Mean Utilization Ratio of a Vehicle 4.4.2 The Mean Arrival Time Interval of an Empty Vehicle 4.4.3 Expected Throughput Capability and Real Throughput Capability of an AMHS 4.4.4 The Waiting Time of a Wafer 4.4.5 Vehicle Blockage-Related indicators 4.4.6 Case Study 4.5 Conclusion References 5 Scheduling methods of automated material handling systems in SWFSs 5.1 Heuristic Rules-Based Scheduling Methods 5.1.1 Heuristic Rules 5.1.2 Heuristic Rules Applied in AMHS Scheduling 5.2 Operation Research Theon/-Based Scheduling Methods 5.2.1 Operation Research Theory 5.3 Artificial Intelligence-Based Scheduling Methods 5.3.1 Artificial Intelligence Algorithms 5.3.2 Intelligent Algorithms Applied in AMHS Scheduling 5.4 Conclusion References 6 Scheduling in Interbay automated material handling systems 6.1 Interbay Automated Material Handling Scheduling Problems 6.2 AMPHI-Based Interbay Automated Material Handling Scheduling Methods 6.2.1 AMPHI-Based Interbay Automated Material Handling Scheduling Model 6.2